This work investigates the impact of Mn and Co doping on the structural, morphological, electrical, and magnetic properties of ZnO thin films deposited via DC magnetron co-sputtering. Doping concentration, substrate temperature, and substrate type (soda-lime glass and oriented silicon wafer) were systematically varied for potential spintronic applications. X-ray diffraction (XRD) and Raman spectroscopy confirmed the formation of a hexagonal wurtzite crystalline structure with a preferential [002] growth orientation when Mn was incorporated into the ZnO matrix.
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