Linear Displacement Calibration System Integrated with a Novel Auto-Alignment Module for Optical Axes.

The quality of processed workpieces is affected directly by the precision of the linear stage. Therefore, the linear displacement calibration of machine tools must be implemented before delivery and after employment for a period of time. How to perform a precise calibration with high inspection efficiency is a critical issue in the precision mechanical engineering industry.

Multi-interferometric displacement measurement system with variable measurement mirrors.

Laser interferometers have been widely implemented for the displacement sensing and positioning calibration of the precision mechanical industry, due to their excellent measuring features and direct traceability to the dimensional definition. Currently some kinds of modified Fabry-Perot interferometers with a planar mirror or a corner cube prism as the measurement mirror have been proposed. Each optical structure of both models has the individual particularity and performance for measuring applications.

Modified Fabry-Perot interferometer for displacement measurement in ultra large measuring range.

Laser interferometers have demonstrated outstanding measuring performances for high precision positioning or dimensional measurements in the precision industry, especially in the length measurement. Due to the non-common-optical-path structure, appreciable measurement errors can be easily induced under ordinary measurement conditions. That will lead to the limitation and inconvenience for in situ industrial applications.

Influence of intensity loss in the cavity of a folded Fabry-Perot interferometer on interferometric signals.

Fabry-Perot interferometer is often used for the micro-displacement, because of its common optical path structure being insensitive to the environmental disturbances. Recently, the folded Fabry-Perot interferometer has been investigated for displacement measurements in large ranges. The advantages of a folded Fabry-Perot interferometer are insensitive to the tilt angle and higher optical resolution.

Fabry-Pérot interferometer utilized for displacement measurement in a large measuring range.

The optical configuration of a Fabry-Pérot interferometer is uncomplicated. This has already been applied in different measurement systems. For the displacement measurement with the Fabry-Pérot interferometer, the result is significantly influenced by the tilt angles of the measurement mirror in the interferometer.

The comparison of environmental effects on michelson and fabry-perot interferometers utilized for the displacement measurement.

The optical structure of general commercial interferometers, e.g., the Michelson interferometers, is based on a non-common optical path.