An integrated thermal compensation system for MEMS inertial sensors.

An active thermal compensation system for a low temperature-bias-drift (TBD) MEMS-based gyroscope is proposed in this study. First, a micro-gyroscope is fabricated by a high-aspect-ratio silicon-on-glass (SOG) process and vacuum packaged by glass frit bonding. Moreover, a drive/readout ASIC, implemented by the 0.

Adaptive control with hysteresis estimation and compensation using RFNN for piezo-actuator.

Because the control performance of a piezoactuator is always severely deteriorated due to hysteresis effect, an adaptive control with hysteresis estimation and compensation using recurrent fuzzy neural network (RFNN) is proposed in this study to improve the control performance of the piezo-actuator. A new hysteresis model by modifying and parameterizing the hysteresis friction model is proposed. Then, the overall dynamics of the piezo-actuator is completed by integrating the parameterized hysteresis model into a mechanical motion dynamics.