Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by LiPO Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge.

Thin amorphous films of LiPON solid electrolyte were prepared by anodic evaporation of lithium orthophosphate LiPO in an arc discharge with a self-heating hollow cathode at a nitrogen pressure of 1 Pa. Distribution of the arc current between two electrodes having an anode potential provided independent control of the evaporation rate of LiPO and the density of nitrogen plasma. Stabilization of the evaporation rate was achieved using a crucible with multi-aperture cover having floating potential.