Surface relief VCSELs at 670 nm with integrated polymer microlens for highly collimated fundamental-mode emission.

We demonstrate the integration of a wet-chemically etched surface relief on a vertical-cavity surface-emitting laser (VCSEL) emitting in the red spectral range for higher-order mode suppression. With this relief, fundamental-mode emission is achieved over the entire power range from threshold beyond thermal rollover. For collimation of the emitted beam, we implement polymer microlenses fabricated on-chip by a thermal reflow technique.

A Unipolar Quantum Dot Diode Structure for Advanced Quantum Light Sources.

Triggered, indistinguishable single photons are crucial in various quantum photonic implementations. Here, we realize a novel n-i-n diode structure embedding semiconductor quantum dots: the gated device enables spectral tuning of the transitions and deterministic control of the charged states. Blinking-free single-photon emission and high two-photon indistinguishability are observed.