Production of mixed phase Ti-rich TiO thin films by oxide defect engineered crystallization.

Amorphous TiO has insufficient chemical stability that can be enhanced with annealing induced crystallization. However, the crystalline structure is already predetermined by the defect composition of the amorphous phase. In this paper, we demonstrate that the oxide defects, , oxygen vacancies and Ti states, can be created by O deficiency during ion-beam sputter deposition without affecting the O/Ti ratio of TiO.

Diversity of TiO: Controlling the Molecular and Electronic Structure of Atomic-Layer-Deposited Black TiO.

Visually black, electrically leaky, amorphous titania (am-TiO) thin films were grown by atomic layer deposition (ALD) for photocatalytic applications. Broad spectral absorbance in the visible range and exceptional conductivity are attributed to trapped Ti in the film. Oxidation of Ti upon heat treatment leads to a drop in conductivity, a color change from black to white, and crystallization of am-TiO.