Pragmatic Micrometre to Millimetre Calibration Using Multiple Methods for Low-Coherence Interferometer in Embedded Metrology Applications.

In-situ metrology utilised for surface topography, texture and form analysis along with quality control processes requires a high-level of reliability. Hence, a traceable method for calibrating the measurement system's transfer function is required at regular intervals. This paper compares three methods of dimensional calibration for a spectral domain low coherence interferometer using a reference laser interferometer versus two types of single material measure.