Mechano-optical wavelength tuning in a photonic crystal microcavity with sub-1 V drive voltage.

A micro-bimorph cantilever with self-aligned nanotips is monolithically integrated with a photonic crystal based device using optical and deep UV lithography techniques. Upon electrostatic actuation, the dielectric nanotips perturb the optical field, providing electromechano-optical modulation of light. Static tuning of the optical transmission spectra by more than 600 pm is measured with a sub-1 V drive voltage, resulting in a modulation as high as 21 dB.

Micromechanically tuned ring resonator in silicon on insulator.

We demonstrate a monolithically integrated micromechano-optical device where the resonance wavelength of a silicon ring resonator is tuned by perturbing the evanescent field with an electrostatically actuated silicon nitride microcantilever. The resonance wavelength can be tuned over 125 pm.