Magnetron Sputtering Deposition of High Quality CsBiI Perovskite Thin Films.

Nontoxic all-inorganic perovskites are among the most promising materials for the realization of optoelectronic devices. Here, we present an innovative way to deposit lead-free, totally inorganic CsBiI perovskite from vapor phase. Taking use of a magnetron sputtering system equipped with a radiofrequency working mode power supply and a single target containing the correct ratio of CsI and BiI salts, it was possible to deposit a CsBiI perovskitic film on silicon and soda-lime glass.