Ion mixing at 20 keV: a comparison of the effects of Ga+, Ar+ and CF4+ ion irradiation.

Medium-energy (some tens of keV) ion irradiation is frequently used in various technologies. It is well known that during this irradiation serious alterations are introduced to the material, changing its structure, composition, etc. While there are studies on the amorphization, no results have been reported on the medium-energy ion beam-induced mixing, however.