Multilayer structures with short periods have been systematically investigated using a tunable soft X-ray synchrotron, BESSY II, and X-ray tube radiation. Multilayer X-ray mirrors of W/B(4)C, W/Sc, Mo/B(4)C, Mo/C, La/B(4)C, Cr/C and Cr/Sc, with periods from 0.8 nm to 3.
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