Determining local modulus and strength of heterogeneous films by force-deflection mapping of microcantilevers.

Estimating the elastic modulus and strength of heterogeneous films requires local measurement techniques. For local mechanical film testing, microcantilevers were cut into suspended many-layer graphene using a focused ion beam. An optical transmittance technique was used to map thickness near the cantilevers, and multipoint force-deflection mapping with an atomic force microscope was used to record the compliance of the cantilevers.