Application of Flexible Four-In-One Microsensor to Internal Real-Time Monitoring of Proton Exchange Membrane Fuel Cell.

In recent years, the development of green energy sources, such as fuel cell, biomass energy, solar energy, and tidal energy, has become a popular research subject. This study aims at a flexible four-in-one microsensor, which can be embedded in the proton exchange membrane fuel cell (PEMFC) for real-time microscopic diagnosis so as to assist in developing and improving the technology of the fuel cell. Therefore, this study uses micro-electro-mechanical systems (MEMS) technology to integrate a micro humidity sensor, micro pH sensor, micro temperature sensor, and micro voltage sensor into a flexible four-in-one microsensor.