Composite silica-titania waveguide films of refractive index ca. 1.8 are fabricated on glass substrates using a sol-gel method and dip-coating technique.
View Article and Find Full Text PDFPlanar photonic components can be fabricated with high resolution by electron beam patterning of polymer thin films on solid substrates such as silicon and glass. However, polymer films are normally formed by spin-coating lithographic resists containing not only polymers but also volatile solvents, which is a serious environmental and health issue. Therefore, we investigate a new type of material for planar structure fabrication (i.
View Article and Find Full Text PDFElectron beam patterning is an important technology in the fabrication of miniaturized photonic devices. The fabrication process conventionally involves the use of radiation sensitive polymer-based solutions (called resists). We propose to replace typical polymer resists with eco-friendly solvent-free room temperature ionic liquids (RTILs), which are polymerized in situ and solidified by an electron beam.
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