Dynamic symmetrical pattern projection based laser triangulation sensor for precise surface position measurement of various material types.

This paper describes a custom, material-type-independent laser-triangulation-based measurement system that utilizes a high-quality ultraviolet laser beam. Laser structuring applications demand material surface alignment regarding the laser focus position, where fabrication conditions are optimal. Robust alignment of various material types was solved by introducing dynamic symmetrical pattern projection, and a "double curve fitting" centroid detection algorithm with subsurface scattering compensation.