Correlation between the Carbon Nanotube Growth Rate and Byproducts in Antenna-Type Remote Plasma Chemical Vapor Deposition Observed by Vacuum Ultraviolet Absorption Spectroscopy.

For sp or sp carbon material growth, it is important to investigate the precursors or intermediates just before growth. In this study, the density of ethylene (C H ) outside the plasma discharge space and just before reaching the carbon nanotube (CNT) growth region is investigated by vacuum ultraviolet absorption spectroscopy for plasma discharge in an antenna-type remote plasma chemical vapor deposition with a CH /H system, with which the growth of very long (≈0.5 cm) CNT forests is achieved.