Optical classification methods that distinguish amorphous carbon films into six types based on refractive index and extinction coefficient have garnered increasing attention. In this study, five types of amorphous carbon films were prepared on Si substrates using different plasma processes, including physical and chemical vapor deposition. The refractive index and extinction coefficient of the amorphous carbon films were measured using spectroscopic ellipsometry, and the samples were classified into five amorphous carbon types-amorphous, hydrogenated amorphous, tetrahedral amorphous, polymer-like, and graphite-like carbon-based on optical constants.
View Article and Find Full Text PDFIn this study, correlation of cell proliferation with surface properties of the polymer-like carbon (PLC) films of different thicknesses prepared by radio-frequency plasma CVD are investigated. Four PLC samples were prepared via radio frequency plasma chemical vapor deposition on Si substrates. Each PLC film was analyzed using spectroscopic ellipsometry to determine its thickness, refractive index (n), and extinction coefficient (k); the thickness ranged from 29.
View Article and Find Full Text PDF