Control of Competing Thermodynamics and Kinetics in Vapor Phase Thin-Film Growth of Nitrides and Borides.

Thin-film  growth is a platform technique that allows the preparation of various undeveloped materials and enables the development of novel energy generation devices. Preferred phase formation, control of crystalline orientation and quality, defect concentration, and stoichiometry in thin films are important for obtaining thin films exhibiting desired physical and chemical properties. In particular, the control of crystalline phase formation by utilizing thin-film technology favors the preparation of undeveloped materials.