Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors.

Piezoelectric micromirrors with aluminum nitride (AlN) and aluminum scandium nitride (AlScN) are presented and compared regarding their static deflection. Two chip designs with 2 × 3 mm (Design 1) and 4 × 6 mm (Design 2) footprint with 600 nm AlN or 2000 nm AlScN as piezoelectric transducer material are investigated. The chip with Design 1 and AlScN has a resonance frequency of 1.

2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride.

A 2D scanning micromirror with piezoelectric thin film aluminum nitride (AlN), separately used as actuator and sensor material, is presented. For endoscopic applications, such as fluorescence microscopy, the devices have a mirror plate diameter of 0.7 mm with a 4 mm chip footprint.