The Effect of a Taper Angle on Micro-Compression Testing of Mo-B-C Coatings.

This research was devoted to studying the influence of the taper angle on the micro-compression of micro-pillars fabricated from near-amorphous and nanocrystalline Mo-B-C coatings. A series of micro-pillars with a taper angle between 4-14° was fabricated by focused ion beam technique. The deformation mechanism was found to be dependent on the taper and, also, on the crystallinity of the coating.