Microcantilever-based current balance for precise measurement of the photon force.

We present a method for the quantitative determination of the photon force (PF)-the force generated by the radiation pressure of photons reflected from the surface. We propose an experimental setup integrating innovative microelectromechanical system (MEMS) optimized for the detection of photon force (pfMEMS). An active microcantilever was used as the force detector, while the measurement was conducted in a closed-loop setup with electromagnetic force compensation.

Optimal Design of Electromagnetically Actuated MEMS Cantilevers.

In this paper we present the numerical and experimental results of a design optimization of electromagnetic cantilevers. In particular, a cost-effective technique of evolutionary computing enabling the simultaneous minimization of multiple criteria is applied. A set of optimal solutions are subsequently fabricated and measured.

Metrological 2iOF fibre-optic system for position and displacement measurement with 31 pm resolution.

In the present paper, we describe a high sensitivity intensity fibre-optic displacement sensor with tens of picometre resolution combined with a sub-picometre resolution interferometric calibration system. Both integrated components form the so-called "2 in one ferrule" system 2iOF. The design and construction of the presented device depend on integrating two sensors' systems within one fibre-optic measuring head, which allows performing in situ calibration process with no additional time-consuming adjustment procedure.

High-resolution and wide-bandwidth light intensity fiber optic displacement sensor for MEMS metrology.

We report on the design, properties, and applications of a high-resolution and wide-bandwidth light intensity fiber optic displacement sensor for microelectromechanical system (MEMS) metrology. There are two types of structures that the system is dedicated to: vibrating with both high and low frequencies. In order to ensure high-frequency and high-resolution measurements, frequency down mixing and selective signal processing were applied.