Nanoelectromechanical devices in a fluidic environment.

We present a comprehensive study of nanoelectromechanical systems in pressurized fluids. Resonant responses and quality factors are monitored in five different gases and one liquid, in pressures ranging from vacuum to 20 MPa, in order to evaluate theoretical models of device-fluid interactions at the nanoscale. The traditional Newell picture of microresonator damping in different pressure regimes is found to be inadequate in describing nanoresonators in general.

Pressurized fluid damping of nanoelectromechanical systems.

Interactions of nanoscale structures with fluids are of current interest both in the elucidation of fluid dynamics at these small scales, and in determining the ultimate performance of nanoelectromechanical systems outside of vacuum. We present a comprehensive study of nanomechanical damping in three gases (He, N2, CO2), and liquid CO2. Resonant dynamics in multiple devices of varying size and frequency is measured over 10 decades of pressure (1 mPa-20 MPa) using time-domain stroboscopic optical interferometry.

A simple cell for the analysis of nanoelectromechanical systems under gas pressure.

A simple yet versatile apparatus for optical microscopy investigations of solid-state devices under high gas pressures is presented. Interchangeable high-grade sapphire windows with different thicknesses allow variable choice of trade-off between the maximum operating pressure and maximum spatial resolution. The capabilities of this compact chamber were tested by performing stroboscopic optical interferometry on nanoelectromechanical systems (NEMSs) under capacitive excitation.