Utilizing reactive DC magnetron sputtering method, TiN coatings were deposited on the silicon substrates at different nitrogen flows and powers. A study of the X-ray phase composition of the coatings was carried out. The stoichiometric composition of the coatings was determined using energy dispersive x-ray spectroscopy.
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January 2023
For the first time, the influence of Cerium (Ce) on the structural, microstructural, Fourier infrared spectroscopy, and LPG sensing behaviour of CoCrCeO (CoCrCe) is described in this study. The solution combustion technique was used to create the CoCrCe samples. All samples were sintered for 3 h at 600 °C to achieve a pure crystalline nature free of impurities.
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