Efficient coupling of dual beam combined laser into micro water jet for deep processing.

In order to improve the power and energy of water-jet-guided laser, this paper introduces a double beam water-jet-guided laser (DWJL) technology. Based spatially polarized light combination and temporal phase modulation, two lasers are effectively coupled into a water jet with diameter of 100 μm. The maximum output peak power reaches 100 kW and the maximum pulse energy is 4.

Controllable Preparation of Fused Silica Micro Lens Array through Femtosecond Laser Penetration-Induced Modification Assisted Wet Etching.

As an integrable micro-optical device, micro lens arrays (MLAs) have significant applications in modern optical imaging, new energy technology, and advanced displays. In order to reduce the impact of laser modification on wet etching, we propose a technique of femtosecond laser penetration-induced modification-assisted wet etching (FLIPM-WE), which avoids the influence of previous modification layers on subsequent laser pulses and effectively improves the controllability of lens array preparation. We conducted a detailed study on the effects of the laser single pulse energy, pulse number, and hydrofluoric acid etching duration on the morphology of micro lenses and obtained the optimal process parameters.