Interferometer for calibration of graduated line scales with a moving CCD camera as a line detector.

A new interferometer for calibration of graduated line scales is described. It uses a novel method for observation of the distance between the graduation lines. The line images are recorded by a moving microscope and a CCD camera.

Interferometric calibration of gauge blocks by using one stabilized laser and a white-light source.

An automated interferometer for primary calibration of gauge blocks is described that requires no prior knowledge of the gauge length. For short gauge blocks, the results agree with previous calibrations to within 10 nm.