High-power picosecond UV and deep-UV laser sources delivering powers of 30 W at 355 nm, 10 W at 266 nm, and 5 W at 213 nm.

Utilizing LiBO, -BaBO crystals, and an Nd:YVO laser with an average power of 70 W and a repetition rate of 100 kHz, we systematically demonstrated and operated high-repetition-rate, high-power, all-solid-state, UV, and deep-UV picosecond laser sources via high-efficiency third-, fourth-, and fifth-harmonic generation (THG, FHG, and FiHG). The maximum output powers of the radiation at 355, 266, and 213 nm reached 31.2, 10.