This paper reports a highly sensitive and selective remote chemical sensing platform for surface-adsorbed trace chemicals by using infrared (IR)-sensitive hydrogel microcantilevers. Poly(ethylene glycol) diacrylate (PEG-DA) hydrogel microcantilevers are fabricated by ultraviolet (UV) curing of PEG-DA prepolymer introduced into a poly(dimethylsiloxane) mold. The resonance frequency of a PEG-DA microcantilever exhibits high thermal sensitivity due to IR irradiation/absorption.
View Article and Find Full Text PDFSince the invention of the atomic force microscope (AFM) three decades ago, there have been numerous advances in its measurement capabilities. Curiously, throughout these developments, the fundamental nature of the force-sensing probe-the key actuating element-has remained largely unchanged. It is produced by long-established microfabrication etching strategies and typically composed of silicon-based materials.
View Article and Find Full Text PDFFluidic resonators with integrated microchannels (hollow resonators) are attractive for mass, density, and volume measurements of single micro/nanoparticles and cells, yet their widespread use is limited by the complexity of their fabrication. Here we report a simple and cost-effective approach for fabricating hollow microtube resonators. A prestructured silicon wafer is annealed at high temperature under a controlled atmosphere to form self-assembled buried cavities.
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