Investigation of Material Constants of CaTiO₃ Doped (K,Na)NbO₃ Film by MEMS-Based Test Elements.

A CaTiO₃-doped (K,Na)NbO₃ (KNN-CT) film is a lead-free piezoelectric film that is expected to substitute Pb(Zr,Ti)O₃ (PZT) film in piezoelectric micro electro mechanical systems (MEMS). However, the full set of the material constants (elastic constants, piezoelectric constants and dielectric constants) of the KNN-CT film have not been reported yet. In this study, all the material constants of a sputter-deposited blanket KNN-CT film were investigated by the resonance responses of MEMS-based piezoelectric resonators and the phase velocities of leaky Lamb waves on a self-suspended membrane.

Evaluation method of TiO2-SiO2 ultra-low-expansion glasses with periodic striae using the LFB ultrasonic material characterization system.

Experimental procedures and standard specimens for characterizing and evaluating TiO2-SiO2 ultra-low expansion glasses with periodic striae using the line-focus-beam (LFB) ultrasonic material characterization system are discussed. Two types of specimens were prepared, with specimen surfaces parallel and perpendicular to the striae plane using two different grades of glass ingots. The inhomogeneities of each of the specimens were evaluated at 225 MHz.

Determination of the true congruent composition for LiTaO3 single crystals using the LFB ultrasonic material characterization system.

The true congruent composition for LiTaO3 single crystals was determined by measuring the velocities of leaky surface acoustic waves (LSAWs) with the line-focus-beam ultrasonic material characterization (LFB-UMC) system for two 42 degrees YX-LiTa3s crystal ingots. The congruent composition determined here was 48.460 Li2O-mol%, corresponding to the LSAW velocity (42 degrees YX-LiTaO3) of 3125.

Evaluation of glass materials by using the line-focus-beam ultrasonic-material-characterization system.

We developed experimental procedures to evaluate glass materials using the line-focus-beam ultrasonic-material-characterization (LFB-UMC) system. We prepared 28 specimens of a commercial borosilicate glass from random lots, and measured the velocities of leaky-surface acoustic waves (LSAWs) and leaky-surface-skimming compressional waves (LSSCWs), VLSAW and VLSSCW, using V(z) curve measurements at 225 MHz and 23 degrees C. The velocities for VLSAW ranged from 3121.

Frequency dependence of acoustic properties of aqueous glucose solutions in the VHF/UHF range.

The bioultrasonic spectroscopy system was employed for measurements of velocity and attenuation coefficient of glucose solutions in the VHF/UHF range. The relation between the slope of the square of velocity and the relaxation parameters, and the relation between the frequency exponent on attenuation coefficient and the relaxation parameters are investigated. In order to carry out numerical calculations, a model for a single relaxation process is employed, wherein the attenuation coefficient is expressed as (A/( 1 + (f/falpha)2) + B)f2 where falpha is the attenuation relaxation frequency, and A and B are constants.

Evaluation of mass-produced commercial LiTaO3 single crystals using the LFB ultrasonic material characterization system.

A mass-production line of lithium tantalate (LiTaO3) crystals with a maximum charge number of 60 for surface acoustic wave (SAW) devices was evaluated with the line-focus-beam (LFB) ultrasonic material characterization system. Some serious problems associated with chemical compositions were observed and resolved by measuring the velocities of Rayleigh-type leaky surface acoustic waves (LSAWs), VLSAW, for two groups of LiTaO3 wafers: 21 36 degrees Y X-LiTaO3 wafers selected randomly from crystal ingots grown with different charge numbers in different furnaces, and 14 42 degrees Y X-LiTaO3 wafers obtained at the top, middle, and bottom parts from 5 crystals selected from 39 crystals grown successively in the same furnace and crucible. Using the measured VLSAW and the predetermined relationship between VLSAW and Li2O concentrations, M(Li2O), we estimated the average M(Li2O) controlled in the current mass-production line to be about 48.

Development of an improved calibration method for the LFB ultrasonic material characterization system.

We investigated standard specimens for accurately calibrating the line-focus-beam ultrasonic material characterization (LFB-UMC) system without system dependencies. We evaluated several types of lithium tantalate (LiTaO3) substrates using two LFB-UMC systems with different device/system characteristics to measure and calibrate the propagation characteristics of the leaky surface acoustic waves (LSAWs), and analyzed the variations between the calibrated results. We concluded from this analysis that, by selecting materials with the cut surfaces and propagation directions of standard specimens that are identical to the objects to be calibrated, calibration errors resulting from different performance characteristics between the two systems could be nearly eliminated.

An evaluation of effective radiuses of bulk-wave ultrasonic transducers as circular piston sources for accurate velocity measurements.

The effective radius of a bulk-wave ultrasonic transducer as a circular piston source, fabricated on one end of a synthetic silica (SiO2) glass buffer rod, was evaluated for accurate velocity measurements of dispersive specimens over a wide frequency range. The effective radius was determined by comparing measured and calculated phase variations due to diffraction in an ultrasonic transmission line of the SiO2 buffer rod/water-couplant/SiO2 standard specimen, using radio-frequency (RF) tone burst ultrasonic waves. Fourteen devices with different device parameters were evaluated.

Precise measurements of bulk-wave ultrasonic velocity dispersion and attenuation in solid materials in the VHF range.

A general method was established for precisely measuring velocity dispersion and attenuation in solid specimens with acoustic losses in the very high frequency (VHF) range, using the complex-mode measurement method and the diffraction correction method. Experimental procedures were presented for implementing such a method and demonstrated this measurement method in the frequency range of 50-230 MHz, using borosilicate glass (C-7740) as a dispersive specimen and synthetic silica glass (C-7980) as a nondispersive standard specimen. C-7980 exhibited no velocity dispersion; velocity was constant at 5929.

Evaluation and improvement of optical-grade LiTaO3 single crystals by the LFB ultrasonic material characterization system.

This paper describes the first demonstration for feeding back the results obtained by the line-focus-beam ultrasonic material characterization (LFB-UMC) system to the crystal growth conditions for optical-grade LiTaO3 crystals and for achieving much improved homogeneity of chemical composition. We evaluated a commercially available optical-grade LiTaO3 single crystal with a nominally congruent composition in detail, by measuring distributions of the velocities of leaky surface acoustic waves (LSAW) along the Y-axis direction for a Z-cut specimen plate prepared from the crystal grown in the Y-axis direction. We detected an increment of 0.

A method of determining acoustical physical constants for piezoelectric materials by line-focus-beam acoustic microscopy.

We developed a new method of determining acoustical physical constants (elastic constant, piezoelectric constant, dielectric constant, and density) of piezoelectric materials with high accuracy. This method acquires velocities of leaky surface acoustic waves (LSAWs) excited on the water-loaded specimen surface, measured by line-focus-beam (LFB) acoustic microscopy, and bulk velocities of longitudinal and shear waves, measured with plane-wave transducers replacing the LFB device in the same system, together with the dielectric constants and density measured independently, for a small number of specimens. For LiNbO3 and LiTaO3 crystals, we demonstrated that we could accurately determine the constants by choosing proper propagation directions of LSAWs and bulk waves for three principal X-, Y-, and Z-cut specimens and one rotated Y-cut specimen [(104) plate for LiNbO3 and (012) plate for LiTaOa].

High-accuracy standard specimens for the line-focus-beam ultrasonic material characterization system.

We prepared standard specimens for the line-focus-beam ultrasonic material characterization system to obtain absolute values of the propagation characteristics (phase velocity and attenuation) of leaky surface acoustic waves (LSAWs). The characterization system is very useful for evaluating and analyzing specimen surfaces. The calibration accuracy of these acoustic parameters depends on the accuracy of acoustical physical constants (elastic constants, piezoelectric constants, dielectric constants, and density) determined for standard specimens.

Standardized evaluation of chemical compositions of LiTaO3 single crystals for SAW devices using the LFB ultrasonic material characterization system.

The line-focus-beam ultrasonic material characterization (LFB-UMC) system is applied to compare and evaluate tolerances provided independently for the Curie temperature T(C) and lattice constant a to evaluate commercial LiTaO3 single crystals by measuring the Rayleigh-type leaky surface acoustic wave (LSAW) velocities V(LSAW). The relationships between V(LSAW), and T(C) and a measured by individual manufacturers were obtained experimentally using 42 degrees Y X-LiTaO3 wafers as specimens from three crystal manufacturers. In addition, the relationship between V(LSAW) and SH-type SAW velocities V(SAW) that are actually used for the SAW device wafers was obtained through calculations, using the chemical composition dependences of the acoustical physical constants for LiTaO3 crystals reported previously.

Development of the line-focus-beam ultrasonic material characterization system.

A line-focus-beam ultrasonic material characterization (LFB-UMC) system has been developed to evaluate large diameter crystals and wafers currently used in electronic devices. The system enables highly accurate detection of slight changes in the physical and chemical properties in and among specimens. Material characterization proceeds by measuring the propagation characteristics, viz.