Publications by authors named "Jun-Chao Ren"
Sensors (Basel)
March 2023
Article Synopsis
- This paper introduces a new hierarchical predictive control strategy for monitoring and controlling silicon single crystal (SSC) quality during the Czochralski crystal growth process, addressing limitations of traditional methods.
- The strategy involves a soft sensor model to track the V/G variable (crystal pulling rate and temperature gradient), crucial for crystal quality, which is hard to measure directly.
- The proposed approach utilizes PID control for quick stabilization and Model Predictive Control (MPC) for handling system constraints, successfully demonstrating its effectiveness with real industrial data.
