Phase noise in capacitively coupled micromechanical oscillators.

Phase noise in capacitively coupled microresonator-based oscillators is investigated. A detailed analysis of noise mixing mechanisms in the resonator is presented, and the capacitive transduction is shown to be the dominant mechanism for low-frequency 1/f-noise mixing into the carrier sidebands. Thus, the capacitively coupled micromechanical resonators are expected to be more prone to the 1/f-noise aliasing than piezoelectrically coupled resonators.