Design and Development of a MOEMS Accelerometer Using SOI Technology.

The micro-electromechanical system (MEMS) sensors are suitable devices for vibrational analysis in complex systems. The Fabry-Pérot interferometer (FPI) is used due to its high sensitivity and immunity to electromagnetic interference (EMI). Here, we present the design, fabrication, and characterization of a silicon-on-insulator (SOI) MEMS device, which is embedded in a metallic package and connected to an optical fiber.