The effects of deposition conditions, such as substrate temperature and CdCl2 post treatments, on the structural and optical properties of CdTe films were investigated. In addition, CdS/CdTe thin-film solar cells were fabricated by an all-sputtering process, and their photovoltaic characteristics were studied. The CdTe films had a polycrystalline, cubic structure with a preferred orientation of the [1 1 1] direction parallel to the substrate surface, regardless of the substrate temperature.
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