Lateral field excited quartz crystal microbalances for biosensing applications.

The most common bulk acoustic wave device used in biosensing applications is the quartz crystal microbalance (QCM), in which a resonant pure shear acoustic wave is excited via electrodes on both major faces of a thin AT-cut quartz plate. For biosensing, the QCM is used to detect the capture of a target by a target-capture film. The sensitivity of the QCM is typically based solely on the detection of mechanical property changes, as electrical property change detection is limited by the electrode on its sensing surface.

A dual lateral-field-excited bulk acoustic wave sensor array.

Recently, there has been interest in the fabrication of multiple quartz crystal microbalances (QCMs) on a single substrate to create a sensor array. However, such devices are ultimately subject to the limitations of the QCM configuration, requiring electrodes and wires on the sensing surface of the crystal substrate, resulting in a cumbersome arrangement that is unable to detect electrical property changes. The lateral-field-excited (LFE) sensor is a novel sensing device that only requires electrodes on the back side of the substrate.

A lateral-field-excited LiTaO3 high-frequency bulk acoustic wave sensor.

The most popular bulk acoustic wave (BAW) sensor is the quartz crystal microbalance (QCM), which has electrodes on both the top and bottom surfaces of an AT-cut quartz wafer. In the QCM, the exciting electric field is primarily perpendicular to the crystal surface, resulting in a thickness field excitation (TFE) of a resonant temperature compensated transverse shear mode (TSM). The TSM, however, can also be excited by lateral field excitation (LFE) in which electrodes are placed on one side of the wafer leaving a bare sensing surface exposed directly to a liquid or a chemi/bio selective layer allowing the detection of both mechanical and electrical property changes caused by a target analyte.

Pure SH-SAW propagation, transduction and measurements on KNbO3.

Potassium niobate (KNbO3) supports the electromechanically active pure shear horizontal surface acoustic wave (SH-SAW) mode along Z-axis cylinder orientations, Euler angles (phi, 90 degrees, 0 degrees), in which two uncoupled wave solutions exist: a purely mechanical sagittal Rayleigh SAW and a piezoelectrically stiffened pure SH-SAW. Within this family of cuts, a maximum electromechanical coupling coefficient for the pure SH-SAW, K2 = 53%, is observed along (0 degrees, 90 degrees, 0 degrees). This pure SH-SAW orientation also has the maximum value of electromechanical coupling observed along rotated Y-cut X propagation directions, Euler angles (0 degrees, theta, 0 degrees).

A lateral field excited liquid acoustic wave sensor.

Lateral field excited (LFE) AT-cut quartz acoustic wave sensors in which the electrodes are located on the reference surface have been fabricated and tested in liquid environments. The sensing surface, which is opposite to the reference surface, is free allowing the electric field of the thickness shear mode (TSM) to penetrate into the liquid. This results in increased sensitivity to both mechanical and electrical property changes of the liquid.