Glass Frit Jetting for Advanced Wafer-Level Hermetic Packaging.

Glass frit bonding is a widely used technology to cap and seal micro-electromechanical systems on the wafer level using a low melting point glass. Screen printing is the main method to apply glass frit paste on wafers. Screen printing of glass frit paste is usually performed on less sensitive, less critical wafers, normally the capping wafer, because screen printing is a rough process involving the mechanical contact of the screen printing mesh and the wafer.

Wireless Readout of Multiple SAW Temperature Sensors.

It has since long been known that surface acoustic wave (SAW) devices, resonators as well as delay lines, can be used as passive wireless sensors for physical quantities, like temperature and pressure, as well as gas sensors or identification-tags (ID-tags). The sensors are robust, work passively without a battery, can be applied at high temperatures, and provide a high resolution. Nevertheless, if the devices are used wirelessly in an industrial environment, several constraints have to be taken into account, especially when more than one quantity or device needs to be measured at the same time.

Experimental and theoretical investigations of some useful langasite cuts for high-temperature SAW applications.

Passive high-temperature sensors are a most promising area of use for SAW devices. Langasite (La3Ga5SiO14; LGS) has been identified as promising piezoelectric material to meet high-temperature SAW challenges. Because it is necessary to know the material behavior for an accurate device design, the frequency¿temperature behavior of Rayleigh SAW (R-SAW) and shear-horizontal SAW (SH-SAW) LGS cuts is investigated on delay line and resonator test structures up to 700°C by RF characterization.

High-precision signal processing algorithm to evaluate SAW properties as a function of temperature.

This paper presents a signal processing algorithm which accurately evaluates the SAW properties of a substrate as functions of temperature. The investigated acoustic properties are group velocity, phase velocity, propagation loss, and coupling coefficient. With several measurements carried out at different temperatures, we obtain the temperature dependency of the SAW properties.

Iridium interdigital transducers for high-temperature surface acoustic wave applications.

Iridium is investigated as a potential metal for interdigital transducers (IDTs) in SAW devices operating at high temperatures. SAW delay lines based on such IDTs and langasite (LGS) substrate are fabricated and electrically characterized. The results show reliable frequency responses up to 1000°C.