Determination of the nonlinear thermo-optic coefficient of silicon nitride and oxide using an effective index method.

There is little literature characterizing the temperature-dependent thermo-optic coefficient (TOC) for low pressure chemical vapor deposition (LPCVD) silicon nitride or plasma enhanced chemical vapor deposition (PECVD) silicon dioxide at temperatures above 300 K. In this study, we characterize these material TOC's from approximately 300-460 K, yielding values of (2.51 ± 0.

Efficient actuation design for optomechanical sensors.

For any nanomechanical device intended for sensing applications, actuation is an important consideration. Many different actuation mechanisms have been used, including self-oscillation, piezoelectric shakers, capacitive excitation, and optically pumping via the optical gradient force. Despite the relatively frequent use of optical pumping, the limits of optical actuation with a pump laser have not been fully explored.

Porous Nanophotonic Optomechanical Beams for Enhanced Mass Adsorption.

We have developed a porous silicon nanocantilever for a nano-optomechanical system (NOMS) with a universal sensing surface for enhanced sensitivity. Using electron beam lithography, we selectively applied a VO/HF stain etch to the mechanical elements while protecting the silicon-on-insulator photonic ring resonators. This simple, rapid, and electrodeless approach generates tunable device porosity simultaneously with the mechanical release step.

Improving mechanical sensor performance through larger damping.

Mechanical resonances are used in a wide variety of devices, from smartphone accelerometers to computer clocks and from wireless filters to atomic force microscopes. Frequency stability, a critical performance metric, is generally assumed to be tantamount to resonance quality factor (the inverse of the linewidth and of the damping). We show that the frequency stability of resonant nanomechanical sensors can be improved by lowering the quality factor.