In this work a microflow structure, suitable for micro-FIA (micro flow injection analysis), will be described, evaluated and applied to real samples. Microchannels, the detector flow cell and input/output ports have been micromachined in silicon and sealed with anodically bonded Pyrex glass. The channels are defined by etching approximately 200 microm depth in silicon using a dry reactive ion etching (RIE) process.
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