Hafnia-Based Ferroelectric Transistor with Poly-Si Gates for Gate-First Three-Dimensional NAND Structures.

Ferroelectric transistors based on hafnia-based ferroelectrics have emerged as promising candidates for next-generation memory devices. Additionally, hafnia-based ferroelectric transistors are suggested for three-dimensional (3D) memory devices, such as 3D ferroelectric NAND. This paper investigates the utilization of poly-Si as a gate material for hafnia-based ferroelectric transistors in 3D NAND structures.

Exploring Disturb Characteristics in 2D and 3D Ferroelectric NAND Memory Arrays for Next-Generation Memory Technology.

Ferroelectric transistors are considered promising for next-generation 3D NAND technology due to their lower power consumption and faster operation compared to conventional charge-trap flash memories. However, ensuring their suitability for such applications requires a thorough investigation of array-scale reliability. This study specifically examines the suitability of hafnia-based ferroelectric transistors for advanced 3D NAND applications, with a specific focus on establishing a disturb-free voltage scheme to ensure the reliability of ferroelectric transistors within the array.