Periodic surface structure of 4H-SiC by 46.9 nm laser.

This paper presents an experimental study on the laser-induced atomic and close-to-atomic scale (ACS) structure of 4H-SiC using a capillary-discharged extreme ultraviolet (EUV) pulse of 46.9 nm wavelength. The modification mechanism at the ACS is investigated through molecular dynamics (MD) simulations.

Study on surface thermal oxidation of silicon carbide irradiated by pulsed laser using reactive molecular dynamics.

Pulsed lasers are a powerful tool for fabricating silicon carbide (SiC) that has a hard and brittle nature, but oxidation is usually unavoidable. This study presents an exploration of the oxidation mechanism of 4H-SiC in oxygen and water under different temperatures via reactive force field molecular dynamics. Single pulse irradiation experiments were conducted to study the oxygen content of the laser-affected zone through energy dispersive x-ray spectrometry.

Effect of sidewall roughness on the diffraction efficiency of EUV high aspect ratio freestanding transmission gratings.

Manufacturing-induced sidewall roughness has a significant impact on the diffraction efficiency of extreme ultraviolet (EUV) gratings and masks, which could be evaluated by a Debye-Waller damping factor. The rough profile models of line structures are always parallel to the surface for the reflective elements. In this manuscript, a model of rough lines along the thickness direction is established, which cannot be ignored for high aspect ratio transmission gratings.

All-Solid-State Thin Film Lithium/Lithium-Ion Microbatteries for Powering the Internet of Things.

As the world steps into the era of Internet of Things (IoT), numerous miniaturized electronic devices requiring autonomous micropower sources will be connected to the internet. All-solid-state thin-film lithium/lithium-ion microbatteries (TFBs) combining solid-state battery architecture and thin-film manufacturing are regarded as ideal on-chip power sources for IoT-enabled microelectronic devices. However, unlike commercialized lithium-ion batteries, TFBs are still in the immature state, and new advances in materials, manufacturing, and structure are required to improve their performance.

Tumor stem cell-derived exosomal microRNA-17-5p inhibits anti-tumor immunity in colorectal cancer via targeting SPOP and overexpressing PD-L1.

Exosomes are known to transmit microRNAs (miRNAs) to affect human cancer progression, and miR-17-5p has been manifested to exert facilitated effects on colorectal cancer (CRC) progression, while the role of tumor stem cells-derived exosomal miR-17-5p in CRC remains unknown. We aim to explore the effect of CRC stem cells-derived exosomes (CRCSC-exos) conveying miR-17-5p on CRC. The exosomes were isolated from CRC stem cells and identified.

Study on Mechanisms of Photon-Induced Material Removal on Silicon at Atomic and Close-to-Atomic Scale.

This paper presents a new approach for material removal on silicon at atomic and close-to-atomic scale assisted by photons. The corresponding mechanisms are also investigated. The proposed approach consists of two sequential steps: surface modification and photon irradiation.

Nanometric Cutting of Silicon with an Amorphous-Crystalline Layered Structure: A Molecular Dynamics Study.

Materials with specific nanometric layers are of great value in both theoretical and applied research. The nanometric layer could have a significant influence on the response to the mechanical loading. In this paper, the nanometric cutting on the layered systems of silicon has been studied by molecular dynamics.