Microfabrication Technologies for Interaction Circuits of THz Vacuum Electronic Devices.

Advances in manufacturing technology are allowing for the realization of interaction circuit with microstructures. The capability to produce small circuit structures is allowing new opportunities for vacuum electronic devices producing terahertz (THz) frequency radiation, which is impractical with traditional machining technology. This publication reviews recent progress on advanced microfabrication technologies applicable to interaction circuits of THz vacuum electronic devices, including LIGA/UV-LIGA (Ultraviolet Lithographic, Galvonoformung and Abformung), deep reactive ion etching (DRIE), micro/nano computer numerical control (CNC) milling, three-dimension (3D) printing, etc.

Demonstration of a 263-GHz Traveling Wave Tube for Electron Paramagnetic Resonance Spectroscopy.

In this letter, a 263 GHz traveling wave tube for electron paramagnetic resonance spectroscopy is designed, fabricated and tested. A periodic permanent magnet focused pencil beam electron optical system is adopted. A folded waveguide slow-wave structure with modified serpentine bends is optimized to provide high-power wideband performance and stable operation.

Frontiers in the Application of RF Vacuum Electronics.

The application of radio frequency (RF) vacuum electronics for the betterment of the human condition began soon after the invention of the first vacuum tubes in the 1920s and has not stopped since. Today, microwave vacuum devices are powering important applications in health treatment, material and biological science, wireless communication-terrestrial and space, Earth environment remote sensing, and the promise of safe, reliable, and inexhaustible energy. This article highlights some of the exciting application frontiers of vacuum electronics.

Vertical Nanoscale Vacuum Channel Triodes Based on the Material System of Vacuum Electronics.

Nanoscale vacuum channel triodes realize the vacuum-like transmission of electrons in the atmosphere because the transmission distance is less than the mean free path of electrons in air. This new hybrid device is the deep integration of vacuum electronics technology, micro-nano electronics technology, and optoelectronic technology. It has the advantages of both vacuum and solid-state devices and is considered to be the next generation of vacuum electronic devices.

A G-Band Broadband Continuous Wave Traveling Wave Tube for Wireless Communications.

Development of a G-band broadband continuous wave (CW) traveling wave tube (TWT) for wireless communications is described in this paper. This device provides the saturation output power over 8 W and the saturation gain over 30.5 dB with a bandwidth of 27 GHz.

Terahertz Rectangular Waveguides by UV-LIGA with Megasonic Agitation.

This paper researches the fabrication of a WR2.8 terahertz rectangular waveguide operating at the frequency ranging from 260 GHz to 400 GHz via UV-LIGA technology (UV-lithography, electroplating, and molding). In the process, megasonic agitation is applied to improve the mechanical properties and internal surface roughness of the WR2.