Fabrication of cell pattern on poly(dimethylsiloxane) by vacuum ultraviolet lithography.

Cell patterning on substrates has played a significant role in the study of basic biology, cell-based biosensor and tissue engineering. In this report, a cell pattern was prepared on poly(dimethylsiloxane) (PDMS) substrate by vacuum ultraviolet (VUV) lithography. After immobilizing allyl-polyethylene glycol (APEG) onto PDMS, a chemical heterogeneous patterned surface was fabricated by VUV (Xe(2) excimer: 172nm) lithography with copper mesh as a photomask.