A High-Voltage-Isolated MEMS Quad-Solenoid Transformer with Specific Insulation Barriers for Miniaturized Galvanically Isolated Power Applications.

The paper reports on high voltage (HV)-isolated MEMS quad-solenoid transformers for compact isolated gate drivers and bias power supplies. The component is wafer-level fabricated via a novel MEMS micro-casting technique, where the tightly coupled quad-solenoid chip consists of monolithically integrated 3D inductive coils and an inserted ferrite magnetic core for high-efficiency isolated power transmission through electromagnetic coupling. The proposed HV-isolated transformer demonstrates a high inductance value of 743.

A High-Performance MEMS Accelerometer with an Improved TGV Process of Low Cost.

High-performance MEMS accelerometers usually use a pendulum structure with a larger mass. Although the performance of the device is guaranteed, the manufacturing cost is high. This paper proposes a method of fabricating high-performance MEMS accelerometers with a TGV process, which can reduce the manufacturing cost and ensure the low-noise characteristics of the device.

MEMS-Casting Fabricated Chip-Style 3D Metal Solenoidal Transformers towards Integrated Power Supply.

A silicon-chip-based 3D metal solenoidal transformer is proposed and developed to achieve AC-DC conversion for integrated power supply applications. With wafer-level micro electromechanical systems (MEMS) fabrication technique to form the metal casting mold and the following micro-casting technique to rapidly (within 6 min) fill molten ZnAl alloy into the pre-micromachined silicon mold, 45-turns primary solenoid and 7-turns secondary solenoid are fabricated in silicon wafers, where the two intertwining solenoids are located at inner deck and outer deck, respectively. Permalloy soft magnetic core is inserted into a pre-etched channel in the silicon chip, which is surrounded by the solenoids.

Double-Deck Metal Solenoids 3D Integrated in Silicon Wafer for Kinetic Energy Harvester.

A silicon-chip based double-deck three-dimensional (3D) solenoidal electromagnetic (EM) kinetic energy harvester is developed to convert low-frequency (<100 Hz) vibrational energy into electricity with high efficiency. With wafer-level micro electro mechanical systems (MEMS) fabrication to form a metal casting mold and the following casting technique to rapidly (within minutes) fill molten ZnAl alloy into the pre-micromachined silicon mold, the 300-turn solenoid coils (150 turns for either inner solenoid or outer solenoid) are fabricated in silicon wafers for saw dicing into chips. A cylindrical permanent magnet is inserted into a pre-etched channel for sliding upon external vibration, which is surrounded by the solenoids.

Treatment of ill-balanced datasets of fMRI with Modified Fuzzy c-means Method.

In fMRI dataset, the population of actived voxels is always much less than the total population of the voxels, and that produced an ill-balanced dataset. Some methods, such as limiting the analysis to the gray matter voxels where the BOLD signal is expected and removing the voxels that is absolutely non-actived based on statistical criteria, have been used to treat the ill-balanced dataset. In this article, a new method, Modified Fuzzy c-means(MFc), has been proposed to treat the ill-balanced dataset of fMRI.