Publications by authors named "Jicun Lu"
Low-Temperature Bonding for Heterogeneous Integration of Silicon Chips with Nanocrystalline Diamond Films.
Micromachines (Basel)
November 2024
Integrating nanocrystalline diamond (NCD) films on silicon chips has great practical significance and many potential applications, including high-power electronic devices, microelectromechanical systems, optoelectronic devices, and biosensors. In this study, we provide a solution for ensuring heterogeneous interface integration between silicon (Si) chips and NCD films using low-temperature bonding technology. This paper details the design and implementation of a magnetron sputtering layer on an NCD surface, as well as the materials and process for the connection layer of the integrated interface.
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- There's a rising demand for effective sensors to detect toluene due to concerns about environmental and personal health.
- Metal oxide semiconductor (MOS) sensors are popular for this purpose but face issues with selectivity, temperature, and stability, limiting their practical use.
- The recently developed AuPt@ZnO nanoflower sensors show a significant improvement in performance, with enhanced sensitivity, lower operating temperature, and better stability, making them promising for real-world toluene detection.