Optical design considerations of rear-side dielectric for higher efficiency of PERC solar cells.

Higher reflectance of the rear-side dielectric stack, at the wavelength of the laser source used for ablation, reduces laser-induced damage and improves the open-circuit voltage of PERC silicon solar cells. The understanding of this correlation increases the working window of cost-effective nanosecond laser ablation of the rear-side dielectric for higher-efficiency industrial PERC-like solar cells.

Versatile pattern generation of periodic, high aspect ratio Si nanostructure arrays with sub-50-nm resolution on a wafer scale.

We report on a method of fabricating variable patterns of periodic, high aspect ratio silicon nanostructures with sub-50-nm resolution on a wafer scale. The approach marries step-and-repeat nanoimprint lithography (NIL) and metal-catalyzed electroless etching (MCEE), enabling near perfectly ordered Si nanostructure arrays of user-defined patterns to be controllably and rapidly generated on a wafer scale. Periodic features possessing circular, hexagonal, and rectangular cross-sections with lateral dimensions down to sub-50 nm, in hexagonal or square array configurations and high array packing densities up to 5.