Analysis of the influence of antireflective coatings on the diffraction efficiency of diffractive optical elements.

Diffractive optical elements (DOEs) may be used as a single optical component with dedicated functionality (e.g. focusing), or as one of the elements in complex hybrid optical systems to reduce the number of the elements and improve imaging quality.

Integrated microinterferometric sensor for in-plane displacement measurement.

We present an integrated sensor based on a grating interferometer (GI) for in-plane displacement measurement in microregions of large engineering structures. The system concept and design, based on a monolithic version of Czarnek's GI, is discussed in detail. The technology chain of the GI measurement head (MH), including the master fabrication and further replication by means of hot embossing, is described.