Publications by authors named "Jeremy Streque"

New designs based on S Lamb modes in AlN thin layer resonating structures coupled with the implementation of structural elements in SiO, are theoretically analyzed by the Finite Element Method (FEM). This study compares the typical characteristics of different interdigital transducer (IDTs) configurations, involving either a continuous SiO cap layer, or structured SiO elements, showing their performance in the usual terms of electromechanical coupling coefficient (K), phase velocity, and temperature coefficient of frequency (TCF), by varying structural parameters and boundary conditions. This paper shows how to reach temperature-compensated, high-performance resonator structures based on ribbon-structured SiO capping.

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Scandium aluminum nitride (ScAlN) films are currently intensively studied for surface acoustic waves (SAW) filters and sensors applications, because of the excellent tradeoff they present between high SAW velocity, large piezoelectric properties and wide bandgap for the intermediate compositions with an Sc content between 10 and 20%. In this paper, the growth of ScAlN and ScAlN films on sapphire substrates by sputtering method is investigated. The plasma parameters were optimized, according to the film composition, in order to obtain highly-oriented films.

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Remote interrogation of surface acoustic wave identification tag (ID-tags) imposes a high signal amplitude which is related to a high coupling coefficient value ( K ) and low propagation losses ( α ). In this article, we propose and discuss an alternative configuration to the standard one. Here, we replaced the conventional configuration, i.

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Polydimethylsiloxane (PDMS) and other related silicon-based polymers are among the most widely employed elastomeric materials in microsystems, owing to their physical and chemical properties. Meanwhile, surface acoustic wave (SAW) and bulk acoustic wave (BAW) sensors and filters have been vastly explored for sensing and wireless applications. Many fields could benefit from the combined use of acoustic wave devices, and polydimethylsiloxane-based soft-substrates, microsystems, or packaging elements.

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Highly efficient tactile display devices must fulfill technical requirements for tactile stimulation, all the while preserving the lightness and compactness needed for handheld operation. This paper focuses on the elaboration of highly integrated magnetic microactuators for tactile display devices. FEM simulation, conception, fabrication, and characterization of these microactuators are presented in this paper.

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