Publications by authors named "Jean Jacques Rousseau"
The operating temperature of integrated magnetic components can be critical. Excessively high temperature can significantly modify the properties of components, especially those of magnetic material, such as saturation magnetization and magnetic permeability. This article introduces an experimental characterization method using two different sensors.
View Article and Find Full Text PDFRecognition of diffraction-grating profile using a neural network classifier in optical scatterometry.
J Opt Soc Am A Opt Image Sci Vis
July 2008
Article Synopsis
- Optical scatterometry is increasingly recognized in the semiconductor industry for deducing the geometry of optical diffraction structures from scattered light intensity.
- This study introduces an artificial neural network classifier designed to identify the geometrical structure of diffraction gratings based on their ellipsometric signatures before further analysis.
- The research focuses on two geometric shapes—sinusoidal and symmetric trapezoidal—using experimental samples from different substrates, highlighting the practical application of the neural network in real manufacturing scenarios.