Interfacial energy-dispersive spectroscopy profile X-ray resolution measurements in variable pressure SEM.

A procedure has been developed to follow degradation of energy-dispersive spectroscopy (EDS) X-ray lateral resolution in a variable pressure scanning electron microscope. This procedure is based on evaluation of the EDS profile shape change for different experimental conditions. Some parameters affecting the X-ray resolution in high-vacuum mode have been taken into account.

Prediction and limitation of polymer degradation in Environmental SEM.

Polymer materials degradation is a well-known limitation to their characterization in SEM. In this paper authors present an additional possibility for polymer imaging offered by the Environmental SEM applied to the PMMA with micrometric relief. As shown by the so-called double-scan procedure, increasing the pressure enables to delay the degradation of the polymer surface.

Pressure and scattering regime influence on the EDS profile resolution at a composite interface in environmental SEM.

Gas impact on the EDS profile resolution at the interface of composite interface resin/Al was investigated with two gaseous environments: helium and water vapor. Two main components of the global profile at the interface were investigated: the contrast of the profile and the spatial resolution. A complementary approach was developed by comparing gas nature impact versus the pressure and versus the scattering regime.