Characterization of an in-vacuum PILATUS 1M detector.

A dedicated in-vacuum X-ray detector based on the hybrid pixel PILATUS 1M detector has been installed at the four-crystal monochromator beamline of the PTB at the electron storage ring BESSY II in Berlin, Germany. Owing to its windowless operation, the detector can be used in the entire photon energy range of the beamline from 10 keV down to 1.75 keV for small-angle X-ray scattering (SAXS) experiments and anomalous SAXS at absorption edges of light elements.

Direct structural characterisation of line gratings with grazing incidence small-angle x-ray scattering.

Grazing incidence small-angle x-ray scattering (GISAXS) and x-ray reflectometry (XRR) have been used to investigate structural parameters, especially period length, line width, groove width, and line height, of grating test structures in the sub-micron range. The gratings are e-beam written structures on a quartz substrate with a fixed period length, but different line and groove widths, covered by a layer of ruthenium. A Ru layer thickness of 9.