Editorial for the Special Issue on Piezoelectric Transducers: Materials, Devices and Applications, Volume III.

This is the third volume of a Special Issue focused on piezoelectric transducers, covering a wide range of topics, including the design, fabrication, characterization, packaging and system integration or final applications of mili/micro/nano-electro-mechanical system-based transducers featuring piezoelectric materials and devices [...

Editorial for the Special Issue on Piezoelectric Transducers: Materials, Devices and Applications, Volume II.

This is the second volume of the Special Issue focused on piezoelectric transducers, covering a wide range of topics, including the design, fabrication, characterization, packaging, and system integration or final applications of mili/micro/nano-electro-mechanical systems-based transducers, featuring piezoelectric materials and devices [...

Miniature Autonomous Robot Based on Legged In-Plane Piezoelectric Resonators with Onboard Power and Control.

This work reports the design, fabrication, and characterization of a centimetre-scale autonomous robot with locomotion based on in-plane piezoelectric resonators and 3D-printed inclined legs. The robot consists of a pair of cooperative piezoelectric motors, an electronic power circuit and a battery-powered microcontroller. The piezoelectric motors feature a lead zirconate titanate (PZT) plate of dimensions 20 mm × 3 mm × 0.

Design and Characterization of a Planar Micro-Conveyor Device Based on Cooperative Legged Piezoelectric MEMS Resonators.

This paper reports the design, fabrication, and performance of a hybrid piezoelectric planar micro-conveyor based on Micro-Electromechanical Systems (MEMS) bridge resonators and featuring 3D-printed vertical legs. The device includes two cooperating silicon plate resonators with an area of 5 × 1 mm, actuated by an integrated aluminum-nitride (AlN) piezoelectric thin film. An optimally designed array of 3D-printed projection legs was attached to the plates, to convert the standing-wave (SW) vertical vibrations into horizontal rotations or translations of the supported slider.

Comparative Study of Traveling and Standing Wave-Based Locomotion of Legged Bidirectional Miniature Piezoelectric Robots.

The use of wave-based locomotion mechanisms is already well established in the field of robotics, using either standing waves (SW) or traveling waves (TW). The motivation of this work was to compare both the SW- and the TW-based motion of a 20-mm long sub-gram glass plate, with attached 3D printed legs, and piezoelectric patches for the actuation. The fabrication of the robot did not require sophisticated techniques and the speed of motion was measured under different loading conditions.

Editorial of Special Issue "Piezoelectric Transducers: Materials, Devices and Applications".

Advances in miniaturization of sensors, actuators, and smart systems are receiving substantial industrial attention, and a wide variety of transducers are commercially available or possess high potential to impact emerging markets [...

Bidirectional Linear Motion by Travelling Waves on Legged Piezoelectric Microfabricated Plates.

This paper reports the design, fabrication and performance of MEMS-based piezoelectric bidirectional conveyors featuring 3D printed legs, driven by linear travelling waves (TW). The structures consisted of an aluminium-nitride (AlN) piezoelectric film on top of millimetre-sized rectangular thin silicon bridges and two electrode patches. The position and size of the patches were analytically optimised for TW generation in three frequency ranges: 19, 112 and 420 kHz, by the proper combination of two contiguous flexural modes.

Motion of a Legged Bidirectional Miniature Piezoelectric Robot Based on Traveling Wave Generation.

This article reports on the locomotion performance of a miniature robot that features 3D-printed rigid legs driven by linear traveling waves (TWs). The robot structure was a millimeter-sized rectangular glass plate with two piezoelectric patches attached, which allowed for traveling wave generation at a frequency between the resonant frequencies of two contiguous flexural modes. As a first goal, the location and size of the piezoelectric patches were calculated to maximize the structural displacement while preserving a standing wave ratio close to 1 (cancellation of wave reflections from the boundaries).

Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid.

A micro- to milli-sized linear traveling wave (TW) actuator fabricated with microelectromechanical systems (MEMS) technology is demonstrated. The device is a silicon cantilever actuated by piezoelectric aluminum nitride. Specifically designed top electrodes allow the generation of TWs at different frequencies, in air and liquid, by combining two neighboring resonant modes.

Piezoelectric MEMS Resonators for Cigarette Particle Detection.

In this work, we demonstrate the potential of a piezoelectric resonator for developing a low-cost sensor system to detect microscopic particles in real-time, which can be present in a wide variety of environments and workplaces. The sensor working principle is based on the resonance frequency shift caused by particles collected on the resonator surface. To test the sensor sensitivity obtained from mass-loading effects, an Aluminum Nitride-based piezoelectric resonator was exposed to cigarette particles in a sealed chamber.

A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity⁻Density Sensors.

Cantilever resonators based on the roof tile-shaped modes have recently demonstrated their suitability for liquid media monitoring applications. The early studies have shown that certain combinations of dimensions and order of the mode can maximize the Q-factor, what might suggest a competition between two mechanisms of losses with different geometrical dependence. To provide more insight, a comprehensive study of the Q-factor and the resonant frequency of these modes in microcantilever resonators with lengths and widths between 250 and 3000 µm and thicknesses between 10 and 60 µm is presented.

Potential of Piezoelectric MEMS Resonators for Grape Must Fermentation Monitoring.

In this study grape must fermentation is monitored using a self-actuating/self-sensing piezoelectric micro-electromechanical system (MEMS) resonator. The sensor element is excited in an advanced roof tile-shaped vibration mode, which ensures high -factors in liquids (i.e.

Reusable chromium-coated quartz crystal microbalance for immunosensing.

The application of oxidized chromium as a reusable platform for the development of immunosensors is presented. Chromium films were deposited on quartz crystal microbalances to study the affinity interaction between rabbit immunoglobulin G (IgG) and goat anti-rabbit IgG. A covalent approach, based on the silane chemistry, was followed for the grafting of either the rabbit IgG or the anti-rabbit IgG on the silane-modified chromium surface.

Screening of non-polar heterocyclic amines in urine by microextraction in packed sorbent-fluorimetric detection and confirmation by capillary liquid chromatography.

A rapid and simple procedure for the direct screening of urine samples is described. The method involves microextraction in a packed sorbent (MEPS) that is on-line coupled to a capillary liquid chromatograph with fluorimetric detection. The overall arrangement works as a screening/confirmatory system for monitoring non-polar heterocyclic aromatic amines (HAAs) in urine samples.