Experimental study and simulation of the damage induced to various multilayer interferential mirrors by soft x-ray plasma-laser sources.

The damage induced to various multilayer interferential mirrors (MIMs) by intense soft X-ray plasma-laser sources are studied both experimentally and theoretically. The mirrors consist of periodic bilayers made up with C/W, Si/Mo, Si/W\. One set of Si/W MIMs is coated with a 100 nm Si film devised to protect the multilayer structure.